According to the International Roadmap for Devices and Systems 2022 Edition [1], the 10A and 14A logic nodes are expected to have 40 nm gate pitch and 16 nm minimum metal pitch.
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Thank you for sharing this insight into enhancement of advanced lithography.....
Thank you for your support!
Video to accompany this article: https://www.youtube.com/watch?v=Yc3yKZGXIx4